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The fundamental characteristics of the resist removal-cleaning system using cryogenic micro-solid nitrogen spray flow were investigated by a new type of integrated measurement technique. The present system utilizes the micro-solid nitrogen (SN2) which consists of the fine solid nitrogen particle produced by the high-speed collision of subcooled liquid nitrogen and the cryogenic gaseous helium (cryogen). According to present study, the effect of ultra-high heat flux cooling on the resist removal performance due to the rapid thermal contraction of resist material is clarified in detail. Furthermore, the effect of ultrasonic atomization of micro-solid nitrogen on ultra-clean performance of the wafer is newly founded.

The fundamental characteristics of the resist removal-cleaning system using cryogenic micro-solid nitrogen spray flow are investigated by a new type of integrated measurement and numerical technique. It can be numerically predicted that the resist removal performance is improved by the scraping effect of impinging micro-solid nitrogen particle fragment in the narrow section between the resist. Furthermore, it is numerically and experimentally founded that the hybrid interactive effects of fluid mechanical force by impingement of micro solid particle and thermomechanical force due to ultra-high heat transfer characteristics contribute to the resist removal-cleaning process.

The ultra −high heat flux characteristics and rapid cooling effect of the micre soLid nitrogen ( SN2 ) spray flow through a two − fiuid nozzle to the heated plate was nu − merically investigated and measured by a new type of 孟 ntegrated simulation technique ． Furthermore ， PIA mesurement has been applied to clarify the solid − particle diameter pro 租 es of the micro −solid spray ， and the wafer resist remova 【characteristics by therm 研 mechanical effect was invest ， igaLed ． Baxsed on the integrated numerical and experimental studyl a new type of ultra − high heat fiux cryogenic cooling system and the thermome − chanical resist removal ． deaning system us 童 ng cryogenic micro −solid spray was developed ， Key Words ； Micro − solid nitrogenl Ultra − high heat flux， Atomization ， Cryogenic wafer cleaning

The fundamental characteristics of heat transfer and cooling performance of micro-solid nitrogen particulate spray impinging on a heated substrate were numerically investigated and experimentally measured by a new type of integrated computational-experimental technique. The employed CFD based on the Euler-Lagrange model is focused on the cryogenic spray behavior of atomized particulate micro-solid nitrogen and also on its ultra-high heat flux cooling characteristics. Based on the numerically predicted performance, a new type of cryogenic spray cooling technique for application to a ultra-high heat power density device was developed. In the present integrated computation, it is clarified that the cryogenic micro-solid spray cooling characteristics are affected by several factors of the heat transfer process of micro-solid spray which impinges on heated surface as well as by atomization behavior of micro-solid particles.