Area-selective atomic layer deposition is a key technology for modern microelectronics as it eliminates alignment errors inherent to conventional approaches by enabling material deposition only in specific areas. Typically, the selectivity originates from surface modifications of the substrate that allow or block precursor adsorption. The control of the deposition process currently remains a major challenge as the selectivity of the no-growth areas is lost quickly. Here, we show that surface modifications of the substrate strongly manipulate the surface diffusion. The selective deposition of TiO2 on poly (methyl methacrylate) and SiO2 yields localized nanostructures with tailored aspect ratios. Controlling the surface diffusion allows to tune such nanostructures as it boosts the growth rate at the interface of the growth and no-growth areas. Kinetic Monte-Carlo calculations reveal that species move from high to low diffusion areas. Further, we identify the catalytic activity of TiCl4 during the formation of carboxylic acid on poly (methyl methacrylate) as the reaction mechanism responsible for the loss of selectivity, and show that process optimization leads to higher selectivity. Our work enables the precise control of areaselective atomic layer deposition on the nanoscale, and offers new strategies in area-selective deposition processes by exploiting surface diffusion effects.

The nonlinear optical response of quantum well excitons excited by optical fields is analyzed by numerical solutions of the semiconductor Bloch equations. Differential absorption spectra are computed for resonant pumping at the exciton resonance and the dependence of the absorption changes on the polarization directions of the pump and probe pulses is investigated. Coherent biexcitonic many-body correlations are included in our approach up to third-order in the optical fields. Results are presented for spatially-direct type-I and spatiallyindirect type-II quantum well systems. Due to the spatial inhomogeneity, in type-II structures a finite coupling between excitons of opposite spins exists already on the Hartree-Fock level and contributes to the absorption changes for the case of opposite circularly polarized pump and probe pulses.

The nonlinear optical response of quantum well excitons is investigated experimentally using polarization resolved four wave mixing, optical-pump optical-probe, and optical-pump Terahertz-probe spectroscopy. The four-wave mixing data reveal clear signatures of coherent biexcitons which concur with straight-forward polarization selection rules at the Γ point. The type-I samples show the well-established time-domain beating signatures in the transients as well as the corresponding spectral signatures clearly. The latter are also present in type-II samples; however, the smaller exciton and biexciton binding energies in these structures infer longer beating times which, in turn, are accompanied by faster dephasing of the type-II exciton coherences. Furthermore, the THz absorption following spectrally narrow, picosecond excitation at energies in the vicinity of the 1s exciton resonance are discussed. Here, the optical signatures yield the well-established redshifts and blueshifts for the appropriate polarization geometries in type-I quantum well samples also termed "AC Stark Effect". The THz probe reveals intriguing spectral features which can be ascribed to coherent negative absorption following an excitation into a virtual state for an excitation below the 1s exciton resonance. Furthermore, the scattering and ionization of excitons is discussed for several excitation geometries yielding control rules for elastic and inelastic quasiparticle collisions.

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