Humidity sensors are widely used in various fields of life. In meteorological detection, the sensor must have high sensitivity and fast dynamic response time due to extreme environmental interference. However, the sensitive mechanism of the humidity sensor determines that the dynamic response time will inevitably be increased while improving the sensitivity, which undoubtedly creates difficulties for sensor design. This article takes the interdigitated capacitive humidity sensor as the research object and proposes an optimal design scheme for the sensor that considers high dynamic response time and sensitivity. By constructing the sensor’s theoretical mathematical model, the influence of each structure is analyzed. The theoretical model has been verified by finite element simulation to have an accuracy higher than 95%. The article constructs the sensor optimization objective equation based on this model. Through analysis, within the range of structural parameters set in the article, to improve the sensitivity and reduce the dynamic response time of the sensor, the width and spacing of the interdigital electrodes should have a minimum value of 3 μm and a maximum value of 14 μm, respectively. The thickness of the electrode layer and the moisture-sensitive layer should be flexibly adjusted according to the application to ensure the lowest value of the optimization objective function. To further improve the sensor’s performance, the article optimizes the electrode structure and heating strategy of the sensor heating layer, which not only enhances the uniformity of heat transfer but also increases the optimal heat transfer area by 6% compared with the traditional scheme.

To meet the needs of a large number of high-altitude meteorological detections, we need to perform fast, high-precision, and high-reliability calibrations of the sensors in the atmospheric detection system (ADS). However, using the traditional method to calibrate the sensor with high precision often takes a lot of time and increases the cost of workforce and material resources. Therefore, a method for realizing fast sensor calibration under the current system hardware conditions is required. A physical field model of Tube–Air–ADS is proposed for the first time, and the transfer function is obtained by combining the system identification, which provides the possibility for dynamic analysis of the calibration system. A Multi-Criteria Adaptive (MCA) PID controller design method is proposed, which provides a new idea for the parameter design of the controller. It controls the amplitude and switching frequency of the controller’s output signal, ensuring the safe and stable operation of the calibration system. Combined with the hardware parameters of the system, we propose the Variable Precision Steady-State Discrimination (VPSSD) method, which can further shorten the calibration time. Comparing and analyzing the current simulation results under Matlab/Simulink, the proposed MCA method, compared with other PID controller design methods, ensures the stable operation of the calibration system. At the same time, compared with the original system, the calibration time is shortened to 47.7%. Combined with the VPSSD method, the calibration time further shortens to 38.7 s.

No abstract