No abstract

Index Terms-Nonlinearities, BAW, electro-acoustic, SiO 2 , second harmonic, third harmonic, third order intermodulation product.

This article discusses on the measured third-order 1 intermodulation (IMD3) products and third harmonics (H3) 2 appearing in a set of six different solidly mounted res-3 onators (SMR) and bulk acoustic-wave (BAW) resonators with 4 different shapes and stack configurations. The discussion is 5 supported by a comprehensive nonlinear distributed circuit 6 model that considers the nonlinear effects potentially occurring 7 in any layer of the resonator stack. The aluminum-nitride (AlN) 8 and silicon-dioxide (SiO 2) layers are identified as the most 9 significant contributors to the IMD3 and H3. The frequency 10 profile of the third-order spurious signals also reveals that, 11 in temperature-compensated resonators, where the SiO 2 layers 12 are usually thicker, the remixing effects from the second-order 13 nonlinear terms are the major contributors to the IMD3 14 and H3. These second-order terms are those that explain 15 the second-harmonic (H2) generation, whose measurements are 16 also reported in this article. Unique values of the nonlinear 17 material constants can explain all the measurements despite 18 the resonators have different shapes, resonance frequencies, and 19 stack configurations. 20 Index Terms-Aluminum nitride (AlN), bulk acoustic 21 wave (BAW), electroacoustic, nonlinear, nonlinearities, silicon 22 dioxide SiO 2 , solidly mounted resonators (SMRs), third-23 harmonic (H3), third-order intermodulation (IMD3), third-order 24 intermodulation (IMD3) product. 25 I. INTRODUCTION 26 W ITH the fast expansion of the current predominant 27 technologies (LTE-A, IEEE wireless LAN standards, AQ:1 28 low-power wide-area networks, and so on) and the new 29 incoming standards (5G-NR, IEEE 802.11ax), the mobile com-30 munication requirements are more stringent than ever. In this 31 scenario, acoustic-wave technology has been playing a crucial 32 role on the development of the RF filtering stages of the 33 current portable devices [1], allowing the inclusion of more 34 than 40 filters per device. Among acoustic technologies, bulk 35 acoustic-wave (BAW) configuration provides many of the 36 filters operating around 2 GHz and above [2].

No abstract

No abstract