We present the latest progress on the industrial scale coating facility for the Advanced Telescope for High-ENergy Astrophysics (ATHENA) mission. The facility has been successfully commissioned and tested, completing an important milestone in preparation of the Silicon Pore Optics (SPO) production capability. We qualified the coating facility by depositing iridium and boron carbide thin films in different configurations under various process conditions including pre-coating in-system plasma cleaning. The thin films were characterized with X-Ray Reflectometry (XRR) using laboratory X-ray sources Cu K-α at 8.048 keV and PTB's four-crystal monochromator beamline at the synchrotron radiation facility BESSY II in the energy range from 3.6 keV to 10.0 keV. Additional X-ray Photoelectron Spectroscopy (XPS) measurements were performed with Al K-α radiation to analyze the composition of the deposited thin films.

Excellent X-ray reflective mirror coatings are key in order to meet the performance requirements of the ATHENA telescope. The baseline coating design of ATHENA was initially formed by Ir/B 4 C but extensive studies have identified critical issues with the stability of the B 4 C top layer which shows strong evolution over time and appears incompatible with the industrialization processes required for the production of mirror modules. Motivated by the need for a compatible top layer material to improve the telescope performance at low energies and based on simulated performance, a SiC top layer has been selected as the best substitute to B 4 C. We report the latest development of Ir/SiC bilayer coatings optimized for ATHENA and the characterization of coating performance and stability.

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