A deep ultraviolet off-axis digital holographic microscope (DHM) is presented. The microscope has been arranged with as least as possible optical elements in the imaging path to avoid aberration due to the non-perfect optical elements. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. To examine the resolution of the system a nano-structured template has been designed and the result confirms the submicron and nanoscale resolution of the arranged DHM setup.

Zusammenfassung Um der wachsenden Nachfrage nach hochauflösenden und dennoch kostengünstigen optischen Drehgebern gerecht zu werden, entstand die Idee, in optischen Drehgebern anstelle der typischerweise verwendeten Kodierscheibe aus Glas eine mikrostrukturierte Kunststoffscheibe ähnlich einer CD oder DVD einzusetzen. Diese kann auf einfache Weise in einem effizienten Spritzprägeprozess hergestellt werden. Damit wird es möglich, die hochgenaue Maßverkörperung mittels eines kostengünstigen Verfahrens in hohen Stückzahlen zu fertigen.

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Rotary sensors are an essential component in numerous applications where a rotation movement has to be detected. With optical encoders, a high angular resolution can be achieved. As a disadvantage, the resolution enhancement is associated with increasing cost. To overcome this issue, a coding principle is presented that uses a diffractive solid measure on a microstructured plastic disc. Like a DVD, this encoder disc can be manufactured in a cost effective injection molding process. For this approach, a differential incremental code, as well as an absolute code, has been developed.

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