In this letter, we propose a method to enhance resistive switching properties in SiCN-based conductive-bridge resistive switching memory (CBRAM) devices by inserting a thin Al2O3 layer between the SiCN resistive switching layer and the TiN bottom electrode. Compared with the Cu/Ta/SiCN/TiN single-layer device, the Cu/Ta/SiCN/Al2O3/TiN double layer device exhibits uniform resistive switching, long stable endurance cycles (>1.6 × 104), and stable retention (104 s) at 125 °C. These substantial improvements in the resistive switching properties are attributed to the location of the formation and rupture of conductive filaments that can be precisely controlled in the device after introducing the Al2O3 layer. Moreover, a multilevel resistive switching characteristic is observed in the Cu/Ta/SiCN/Al2O3/TiN double layer CBRAM device. The distinct six-level resistance states are obtained in double layer devices by varying the compliance current. The highly stable retention characteristics (>104) of the Cu/Ta/SiCN/Al2O3/TiN double layer device with multilevel resistance states are also demonstrated.

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