Electron transport in vacuum-deposited a-Se films with thicknesses varying from 13 to 501 m has been investigated by conventional time-of-flight (TOF) and interrupted field TOF experiments. To separate the influences of electric field and the thickness, all TOF experiments were performed at a constant electric field. It has been found that the electron mobility is relatively constant in thick films (L > 50 m) and increases in thinner films (L < 50 m) with decreasing thickness. On the other hand, the electron lifetime is relatively thickness independent in films with thickness L > 50 m, but drops sharply in thin films when L < 50 m. These observations can be explained based on the density of states model that includes three types of traps forming Gaussian-like distributions within the mobility gap as reported in Koughia et al. (J. Appl. Phys. 97, 033706 (2005)).Résumé : Nous étudions, par temps de vol (TOF) sans et avec interruption, le transport d'électrons dans des films de a-Se déposés sous vide et d'épaisseur allant de 13 à 501 m. Afin de séparer l'influence du champ électrique de celle de l'épaisseur, toutes les mesures sont faites à champ électrique constant. Nous trouvons que la mobilité électronique est relativement constante dans les films épais (L > 50 m) et augmente dans les films minces (L < 50 m) lorsque l'épaisseur décroît. D'autre part, le temps de vie des électrons est relativement indépendant de l'épaisseur si L > 50 m, mais décroît rapidement lorsque L diminue sous les 50 m. Ces observations s'expliquent sur la base du modèle de densité d'états qui inclut trois types de pièges formant une distribution de type gaussien à l'intérieur du gap de mobilité, tel que rapporté par Koughia et al. (J. Appl. Phys. 97, 033706 (2005)).
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