Ultrawide-bandgap semiconductors are ushering in the next generation of high-power electronics. The correct crystal orientation can make or break successful epitaxy of such semiconductors. Here, it is found that single-crystalline layers of α-(AlGa)2O3 alloys spanning bandgaps of 5.4 to 8.6 eV can be grown by molecular beam epitaxy. The key step is found to be the use of m-plane sapphire crystal. The phase transition of the epitaxial layers from the α- to the narrower bandgap β-phase is catalyzed by the c-plane of the crystal. Because the c-plane is orthogonal to the growth front of the m-plane surface of the crystal, the narrower bandgap pathways are eliminated, revealing a route to much wider bandgap materials with structural purity. The resulting energy bandgaps of the epitaxial layers span a broad range, heralding the successful epitaxial stabilization of the largest bandgap materials family to date.
Here, we have explored the thermal stability of α-(Al,Ga)2O3 grown by the molecular-beam epitaxy on m-plane sapphire under high-temperature annealing conditions for various Al compositions (i.e., 0%, 46%, and 100%). Though uncapped α-Ga2O3 undergoes a structural phase transition to the thermodynamically stable β-phase at high temperatures, we find that an aluminum oxide cap grown by atomic layer deposition preserves the α-phase. Unlike uncapped α-Ga2O3, uncapped α-(Al,Ga)2O3 at 46% and 100% Al content remain stable at high temperatures. We quantify the evolution of the structural properties of α-Ga2O3, α-(Al,Ga)2O3, and α-Al2O3 and the energy bandgap of α-Ga2O3 up to 900 °C. Throughout the anneals, the α-Ga2O3 capped with aluminum oxide retains its high crystal quality, with no substantial roughening.
An investigation was made into the epitaxial growth and luminescence properties of InAs1-x-ySbxPy p-n junctions grown by liquid phase epitaxy (LPE). Details of the growth conditions and X-ray analysis are given, together with both photoluminescence (PL) and electroluminescence (EL) results measured over the temperature range 78-295 K. The temperature dependence of the luminescence emission was investigated in detail and compared with theory.
We report the growth of α-Ga2O3 on -plane α-Al2O3 by conventional plasma-assisted molecular-beam epitaxy (MBE) and In-mediated metal-oxide-catalyzed epitaxy (MOCATAXY). We report a growth-rate-diagram for α-Ga2O3 (101-0), and observe (i) a growth rate increase, (ii) an expanded growth window, and (iii) reduced out-of- lane mosaic spread when MOCATAXY is employed for the growth of α-Ga2O3. Through the use of In-mediated catalysis, growth rates over 0.2 μm hr−1 and rocking curves with full width at half maxima of Δω ≈ 0.45° are achieved. Faceting is observed along the α-Ga2O3 film surface and is explored through scanning transmission electron microscopy.
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