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The detailed experimental investigation of the performance of a commercially available smart humidity sensor used for the measurement of relative humidity at elevated pressures (0.1–2 MPa) is reported. A dedicated set-up was developed for generating defined humidities in pressurized air. The measurements reveal that the pressure coefficient of the sensor deviation at a given relative humidity condition cannot be attributed solely to the enhancement factor of the humid air. For such microsensors, an additional sensor-specific pressure compensation factor was determined which is significant for precise measurements in applications with pressurized air.

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