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Experimental and theoretical results are given for the one and twodimensional Covington-Drane optical synthetic apertures and the thin annular aperture. The segmented thin annulus is also discussed as a special case of the thin continuous annulus. Experiments are performed by masking a diffractionlimited lens with the appropriate pupil function and then measuring the imaging characteristics of the aperture. All the synthetic apertures are shown to have the full synthetic MTF's predicted by the theory. The Covington-Drane doubles the resolution of the central aperture and the thin annular apertures synthesize the full lens spatial frequency response. Optical processing of synthetic aperture photography is discussed and examples of inverse spatial filters are given.

Recent studies show that white light, or broadband, metrology systems continue to be used as the "work-horse" method for measuring features at 1.0 micron and below in production manufacturing environments. With the advances in the area of broadband optical metrology using sophisticated digital -image enhancement techniques, production quality measurements are now possible down to 0.5 micron and below. The purpose of this paper is to show substantial evidence that reliable, fully automatic, high speed, dynamic mode measurements can be made using optical methods on substrates in the range of 0.5 to 0.3 microns, with excellent repeatability and correlation to a SEM reference.