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Sandblasting, a conventional technique which is used for paint or scale removing, deburring, and glass decorating, has recently been developed into a powder blasting technique for brittle materials capable of producing micro-structures larger than 100 lm. This article describes an investigation of the effects of the impact angle of particles, the scanning times, and the standoff distance on the surface roughness, the weight-loss rate of samples with no mask, and the wall profile and overetching of samples with different mask patterns in powder blasting of soda-lime glass. The parameters are the various impact angles between 50 and 90°, the scanning times of a nozzle up to 40, and the standoff distances between 70 and 100 mm. The widths of the mask pattern are 0.2 mm, 0.5 mm, and 1 mm. The powder used is Al2O3 sharp particles, WA#600. The mass flow rate of powder during the erosion test is constant at 175 g/min and the blasting pressure of the powder is 0.2 Mpa. After a series of necessary experiments are performed, the results are investigated and analysed. As a result, a fundamental basis is established that can be applied to powder blasting to produce micro-mechanical parts of glass.

In this study, micro fluid channels are machined on fused silica glass via powder blasting, a mechanical etching process, and the machining characteristics of the channels are experimentally evaluated. In the process, material removal is performed by the collision of micro abrasives injected by highly compressed air on to the target surface. This approach can be characterized as an integration of brittle mode machining based on micro crack propagation. Fused silica glass, a high purity synthetic amorphous silicon dioxide, is selected as a workpiece material. It has a very low thermal expansion coefficient and excellent optical qualities and exceptional transmittance over a wide spectral range, especially in the ultraviolet range. The powder blasting process parameters affecting the machined results are injection pressure, abrasive particle size and density, stand-off distance, number of nozzle scanning, and shape/size of the required patterns. In this study, the influence of the number of nozzle scanning, abrasive particle size, and pattern size on the formation of micro channels is investigated. Machined shapes and surface roughness are measured using a 3-dimensional vision profiler and the results are discussed.

For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These techniques, which require a proper photoresist, mask, UV light exposure, developing, and electroplating as a pre-process, are considered to have some problems. In this study, we propose a new microfabrication technology which consists of micro end-milling and powder blasting. This technique could be directly applied to fabricate the metal mold without any preprocesses. The metal mold with micro-channels is machined by micro end-milling, and then, burrs generated in the end-milling process are removed by powder blasting. From the experimental results, micro end-milling combined with powder blasting could be applied effectively for fabrication of the injection mold of biochips with micro fluidic channels.

Portable electronic devices such as notebook computers, PDAs, cellular phones, etc., are being widely used, and they increasingly need cheap, efficient, and lightweight power sources. Fuel cells have been proposed as possible power sources to address issues that involve energy production and the environment. In particular, a small type of fuel-cell system is known to be suitable for portable electronic devices. The development of micro fuel cell systems can be achieved by the application of microchannel technology. In this study, the conventional method of chemical etching and the mechanical machining method of micro end milling were used for the microfabrication of microchannel for fuel cell separators. The two methods were compared in terms of their performance in the fabrication with regards to dimensional errors, flatness, straightness, and surface roughness. Following microchannel fabrication, the powder blasting technique is introduced to improve the coating performance of the catalyst on the surface of the microchannel. Experimental results show that end milling can remarkably increase the fabrication performance and that surface treatment by powder blasting can improve the performance of catalyst coating.