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300mm semiconductor manufacturing requires a full automated material handling system (AMHS). AMHS operation is tightly coupled with FAB production. Lot scheduling and dispatching are restricted by movement of material, while decisions for material move also should consider lot status and schedules. Therefore, AMHS should be well coordinated with the lot scheduling and dispatching. For the effectiveness of AMHS operation, following three problems that directly cause the change of the material transportation and storage should be solved. The first problem is the stocker allocation which determines the best stocker considering AMHS status. The second is the WIP balancing between cells by controlling the transport timing. The third is the transport prioritization for maximizing the production productivity. In this research, we propose advanced functionalities and logistics for the three problems to improve the effectiveness of AMHS.

This paper discusses a scheduling problem with delay time constraint arising in the semiconductor manufacturing. The delay time constraint means that a process should be started within delay time from the start step of the process. It becomes more critical to determine the FAB yield and product quality. This paper examines scheduling and control problem for semiconductor manufacturing which has time constrained processes. We classify the problem into 3 levels and propose the solution algorithm for each problem. We also explain how to integrate our MES system for the problem.