Objectives : Manufacturing－based production facilities are required to install dust collection devices for air pollution prevention facilities. In particular, manufacturing-based companies need low-power hazardous gas treatment devices. However, due to the slowing economic growth, the cost of replacing new hazardous gas treatment devices is increasing, and new products in the form of parts that can be attached to scrubbers that are already installed are urgently needed.Methods : To deal with residual gas from organic and inorganic compounds used in semiconductor manufacturing processes, the concentration of air pollutants emitted through the process of removing harmful substances from the primary scrubber and re-treatment of gases emitted from the secondary scrubber is further lowered.Results and Discussion : In this study, a cooling block device which is a hazardous gas treatment part is developed to solve the limitation of scrubber processing capacity from overcapacity harmful gases such as strong toxicity, corrosivity, combustion, and environmental pollution in semiconductor manufacturing process.Conclusions : In the design factors and performance survey of cooling module using thermoelectric element, it was calculated that the cooling capacity of the peltier thermoelectric element with a margin of 9,300 W was required. Based on these results, the absolute humidity decreased by 5.8 g/kg and the temperature decreased by 9.5 degrees, showing the possibility of solving the problem of the decrease in the effectiveness of hazardous gas treatment of secondary scrubber due to increased moisture.

East Asia is characterized by anthropogenic emissions resulting from the large population and fast economic growth of this region. Since the prevailing wind is westerly and northwesterly, emissions from Ul-jin can be expected to contribute to acidic deposition increase in downwind direction.Aerosols collected at the near coast site, Uljin geun, gyungbook and were analyzed for NH4 The seasonal averaged aerosol concentration showed the highest potassium and calcium ion in winter and the highest ammonium ion due to a meadow and high solar intensity in summer. Sodium and chloride ion showed the same ratio all seasons and sulfate and nitrate species showed the maximum value in winter Chemical components of aerosols collected at the near coast site, Uljin geun, gyungbook were lower by 16 to 73% than those collected at other similar environment site such as kanghwa, yangyang. Comparing air quality data at the near coast site, Uljin geun, gyungbook, There was found that Uljin coast site is less influenced by the sea salts(potassium, magnesium, calcium) and nss-SO4 2-percentage is 3~13% higher than similar condition site.