A theoretical study of the quality and the validity range of different numerical and analytical methods of calculating of the frequency shift in measurement using microcromechanical sensor is presented. This work considered a calculating method for natural frequency in comparison with experimentally measured oscillation frequencies of microcromechanical sensor immersed in air and/or viscous medium. The numerical methods for solving the equation of resonance oscillation of the console fixed on one side are considered for calculating the natural oscillation frequencies of standard AFM cantilevers.

This paper presents the results of modeling and fabrication of silicon membranes for acoustic sensors with resonant frequency from 2 kHz to 60 kHz and pressures from 0.1 to 14 Pa. An analysis of the constructive and mechanical parameters of monocrystalline silicon membranes is performed. The range of membrane edge length (6-20 mm) at a fixed thickness of 50 μm determined. The etching process of a silicon wafer by anisotropic wet etching was studied. A process flow for manufacturing silicon membranes is proposed. The results of experimental studies of amplitude-frequency characteristic of membranes are obtained.

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