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HIS PAPER gives a complete description of the work briefly presented in [1]. Consumer products have recently started incorporating micro-magnetometers to be used as compasses. In combination with pressure sensors, accelerometers and gyroscopes, these sensors allow improved navigation both in scenarios where GPS is available and when it is not, such as for indoor navigation. In some cases this trend has already suggested the commercialization of multi-axis (or combo) MEMS sensor units.Lorentz force MEMS magnetometers [2]-[9] can be particularly advantageous with respect to other devices for the measurement of magnetic fields in the direction orthogonal to the substrate (z-axis magnetometers). When compared to Hall-effect sensors, Lorentz force devices have the advantage of lower power consumption and easier integration with standard, silicon-based, MEMS fabrication technologies.

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