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This study is devoted to thermomechanical response and modeling of copper thin films and interconnects. The constitutive behavior of encapsulated copper film is first studied by fitting the experimentally measured stress-temperature curves during thermal cycling. Significant strain hardening is found to exist. Within the continuum plasticity framework, the measured stress-temperature response can only be described with a kinematic hardening model. The constitutive model is subsequently used for numerical thermomechanical modeling of Cu interconnect structures using the finite element method. The numerical analysis uses the generalized plane strain model for simulating long metal lines embedded within the dielectric above a silicon substrate. Various combinations of oxide and polymer-based low-k dielectric schemes, with and without thin barrier layers surrounding the Cu line, are considered. Attention is devoted to the thermal stress and strain fields and their dependency on material properties, geometry, and modeling details. Salient features are compared with those in traditional aluminum interconnects. Practical implications in the reliability issues for modern copper/low-k dielectric interconnect systems are discussed.

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The lap-shear technique is commonly used to evaluate the shear, creep, and thermal fatigue behavior of solder joints. We have conducted a parametric experimental and modeling study, on the effect of testing and geometrical parameters on solder/copper joint response in lap-shear. It was shown that the farfield applied strain is quite different from the actual solder strain (measured optically). Subtraction of the deformation of the Cu substrate provides a reasonable approximation of the solder strain in the elastic regime, but not in the plastic regime. Solder joint thickness has a profound effect on joint response. The solder response moves progressively closer to "true" shear response with increasing joint thickness. Numerical modeling using finite-element analyses were performed to rationalize the experimental findings. The same lap-shear configuration was used in the simulation. The input response for solder was based on the experimental tensile test result on bulk specimens. The calculated shear response, using both the commonly adopted far-field measure and the actual shear strain in solder, was found to be consistent with the trends observed in the lap-shear experiments. The geometric features were further explored to provide physical insight into the problem. Deformation of the substrate was found to greatly influence the shear behavior of the solder.