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The determination of the electronic stopping power for low-energy ions is an experimentally demanding task. In this paper we elaborate on the different effects of nuclear stopping and multiple scattering on the energy spectra for different experimental geometries, i.e., transmission through thin foils and backscattering from thin films. By calculating distributions of path lengths and scattering angles we demonstrate how electronic stopping, nuclear stopping, and multiple scattering add up to the total energy loss. We show that at low energies it is important to properly disentangle these effects to extract electronic stopping from the measured energy loss spectra.

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