The electrochemical capacitance-voltage (ECV) technique can practically profile carrier concentrations on textured surfaces, but reliable calibration of the surface area is strongly demanded since it plays a decisive role in calculating both the carrier concentration and the profiling depth. In this work, we calibrate the area factor of pyramidally textured surfaces by comparing ECV profiles with cross-sectional scanning electron microscopy image, and found out it is 1.66, and not 1.73 which was formerly assumed. Furthermore, the calibrated area factor was applied to POCl 3 and BBr 3 diffusions which resulted in comparable diffusion profiles for both textured and polished surfaces.
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