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The ongoing need for miniaturization and an increase of throughput in IC-manufacturing is obstructed by performance limitations in motion control of nano-positioning wafer stages. These limitations are imposed by flexible dynamical behavior, associated with structural deformations of the nano-positioning stages. The aim of this research is to investigate limits on achievable performance in a conventional control configuration and to mitigate these limits through the use of additional actuators and sensors. To this end, a systematic framework for control design using additional actuators and sensors in the generalized plant configuration is presented, which leads to a well-posed H∞-control optimization problem that extends conventional design approaches in a natural way and exploits physical insight to address structural deformations in weighting filter design. Through an experimental confrontation of the design framework with a prototype next-generation nano-positioning motion system, successful performance enhancement beyond the conventional limits is demonstrated.

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Due to ever increasing performance requirements, model-based optimization and control strategies are increasingly being adopted by machine builders and automotive companies. However, this demands an increase in modelling effort and a growing knowledge of optimization techniques, as a sufficient level of detail is required in order to evaluate certain performance characteristics. Modelling tools such as MATLAB Simscape have been created to reduce this modelling effort, allowing for greater model complexity and fidelity. Unfortunately, this tool cannot be used with high-performance gradient-based optimization algorithms due to obfuscation of the underlying model equations. In this work, an optimization toolchain is presented that efficiently interfaces with MATLAB Simscape to reduce user effort and the necessary skill and computation time required for the optimization of high-fidelity drivetrain models. The toolchain is illustrated on an industrially relevant conjugate cam-follower system, which is modelled in the Simscape environment and validated with respect to a higher-fidelity modeling technique, namely, the finite element method (FEM).