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LixLn5–xMo3O16.5–1.5xFx (0.8 ≤ x ≤ 1.4 (Ln = La), 0.4 ≤ x ≤ 1 (Ln = Pr), 0.6 ≤ x ≤ 1 (Ln = Nd)) solid solutions on the Ln5Mo3O16–LiLn4Mo3O15F joins of the Ln2O3–MoO3–LiF ternary systems, similar to the fluorite‐related cubic compound Nd5Mo3O16, have been prepared by solid‐state reactions. Substitutions of lithium on the rare‐earth site and fluorine on the oxygen site have been shown to lead to a reversible phase transition accompanied by an anomaly in permittivity and a jump in conductivity by one and half orders of magnitude. In a wet atmosphere, the LixLn5–xMo3O16.5–1.5xFx compounds may have proton conductivity.

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