No abstract

We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.

We review crane models available in the literature, classify them, and discuss their applications and limitations. A generalized formulation of the most widely used crane model is analyzed using the method of multiple scales. We also review crane control strategies in the literature, classify them, and discuss their applications and limitations. In conclusion, we recommend appropriate models and control criteria for various crane applications and suggest directions for further work.

We present a nonlinear model of electrically actuated microbeams accounting for the electrostatic forcing of the air gap capacitor, the restoring force of the microbeam and the axial load applied to the microbeam. The boundary-value problem describing the static deflection of the microbeam under the electrostatic force due to a dc polarization voltage is solved numerically. The eigenvalue problem describing the vibration of the microbeam around its statically deflected position is solved numerically for the natural frequencies and mode shapes. Comparison of results generated by our model to the experimental results shows excellent agreement, thus verifying the model. Our results show that failure to account for mid-plane stretching in the microbeam restoring force leads to an underestimation of the stability limits. It also shows that the ratio of the width of the air gap to the microbeam thickness can be tuned to extend the domain of the linear relationship between the dc polarization voltage and the fundamental natural frequency. This fact and the ability of the nonlinear model to accurately predict the natural frequencies for any dc polarization voltage allow designers to use a wider range of dc polarization voltages in resonators.

We present a new architecture for wideband vibration-based micro-power generators (MPGs). It replaces a linear oscillator with a piecewise-linear oscillator as the energy harvesting element of the MPG. A prototype of an electromagnetic MPG designed accordingly is analyzed analytically, numerically and experimentally. We find that the new architecture increases the bandwidth of the MPG during a frequency up-sweep, while maintaining the same bandwidth in a down-sweep. Closed-form expressions for the response of the new MPG as well as the up-sweep bandwidth are presented and validated experimentally. Simulations show that under random-frequency excitations, the new MPG collects more energy than the traditional MPG.