Nano-and microscale holes, as well as related sub-ablative nanospikes and sub-micron bumps, were produced in a 30-nm thick silver film on a silica substrate by single femtosecond laser pulses with variable pulse energies, focused by different strong focusing optics. Characteristic laser energy deposition dimensions exceed the expected focal spots by nearly 2 microns, indicating the considerable lateral thermal transport in the film, while the effective hole formation thresholds decrease versus increasing numerical aperture of focusing optics. Morphologies of the sub-ablative solidified surface nanostructures and numerical estimates of deposited volume energy density undermine blowing-off the molten film due to subsurface boiling and near-critical phase explosion at lower and higher sub-threshold fluences, respectively.

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