Nuclear magnetic resonance spectroscopy is a powerful tool for the structural analysis of organic compounds and biomolecules but typically requires macroscopic sample quantities. We use a sensor, which consists of two quantum bits corresponding to an electronic spin and an ancillary nuclear spin, to demonstrate room temperature magnetic resonance detection and spectroscopy of multiple nuclear species within individual ubiquitin proteins attached to the diamond surface. Using quantum logic to improve readout fidelity and a surface-treatment technique to extend the spin coherence time of shallow nitrogen-vacancy centers, we demonstrate magnetic field sensitivity sufficient to detect individual proton spins within 1 second of integration. This gain in sensitivity enables high-confidence detection of individual proteins and allows us to observe spectral features that reveal information about their chemical composition.

A central challenge in developing quantum computers and long-range quantum networks lies in the distribution of entanglement across many individually controllable qubits 1 . Colour centres in diamond have emerged as leading solid-state 'artificial atom' qubits 2,3 , enabling on-demand remote entanglement 4 , coherent control of over 10 ancillae qubits with minute-long coherence times 5 , and memory-enhanced quantum communication 6 . A critical next step is to integrate large numbers of artificial atoms with photonic architectures to enable large-scale quantum information processing systems. To date, these efforts have been stymied by qubit inhomogeneities, low device yield, and complex device requirements. Here, we introduce a process for the high-yield heterogeneous integration of 'quantum micro-chiplets' (QMCs) -diamond waveguide arrays containing highly coherent colour centreswith an aluminium nitride (AlN) photonic integrated circuit (PIC). Our process enables the development of a 72-channel defect-free array of germanium-vacancy (GeV) and silicon-vacancy (SiV) colour centres in a PIC. Photoluminescence spectroscopy reveals long-term stable and narrow average optical linewidths of 54 MHz (146 MHz) for GeV (SiV) emitters, close to the lifetime-limited linewidth of 32 MHz (93 MHz). Additionally, inhomogeneities in the individual qubits can be compensated in situ with integrated tuning of the optical frequencies over 100 GHz. The ability to assemble large numbers of nearly indistinguishable artificial atoms into phase-stable PICs provides an architecture toward multiplexed quantum repeaters 7,8 and general-purpose quantum computers [9][10][11] . Main textArtificial atom qubits in diamond combine minute-scale quantum memory times 5 with efficient spin-photon interfaces 2 , making them attractive for processing and distributing quantum information 1,3 . However, the low device yield of functional qubit systems presents a critical barrier to large-scale quantum information processing (QIP). Furthermore, although individual diamond cavity systems coupled to artificial atoms can now achieve excellent performance, the lack of active chip-integrated photonic components and wafer-scale single crystal diamond currently prohibit scaling to large-scale QIP applications [8][9][10][11] . A promising method to alleviate these constraints is heterogeneous integration (HI), which is increasingly used in advanced microelectronics to assemble separately fabricated sub-components into a single, multifunctional chip. HI approaches have also recently been used to integrate PICs with quantum devices, including quantum dot single-photon sources 12,13 , superconducting nanowire single-photon detectors 14 , and nitrogen-vacancy (NV) centre diamond waveguides 15 . However, these demonstrations assembled components one-by-one, which presents a formidable scaling challenge. The diamond 'quantum micro-chiplet (QMC)' introduced here significantly improves HI assembly yield and accuracy to enable a 72-channel defect-free waveguide-coupled art...

We demonstrate a robust experimental method for determining the depth of individual shallow Nitrogen-Vacancy (NV) centers in diamond with ∼ 1 nm uncertainty. We use a confocal microscope to observe single NV centers and detect the proton nuclear magnetic resonance (NMR) signal produced by objective immersion oil, which has well understood nuclear spin properties, on the diamond surface. We determine the NV center depth by analyzing the NV NMR data using a model that describes the interaction of a single NV center with the statistically-polarized proton spin bath. We repeat this procedure for a large number of individual, shallow NV centers and compare the resulting NV depths to the mean value expected from simulations of the ion implantation process used to create the NV centers, with reasonable agreement.

Improving the temporal resolution of single photon detectors has an impact on many applications 1 , such as increased data rates and transmission distances for both classical 2 and quantum 3-5 optical communication systems, higher spatial resolution in laser ranging and observation of shorter-lived fluorophores in biomedical imaging 6 . In recent years, superconducting nanowire single-photon detectors 7,8 (SNSPDs) have emerged as the highest efficiency time-resolving single-photon counting detectors available in the near infrared 9 . As the detection mechanism in SNSPDs occurs on picosecond time scales 10 , SNSPDs have been demonstrated with exquisite temporal resolution below 15 ps [11][12][13][14][15] . We reduce this value to 2.7±0.2 ps at 400 nm and 4.6±0.2 ps at 1550 nm, using a specialized niobium nitride (NbN) SNSPD. The observed photon-energy dependence of the temporal resolution and detection latency suggests that intrinsic effects make a significant contribution.Temporal resolution in SNSPDs, commonly referred to as jitter, is characterized by the width of the temporal distribution of signal outputs with respect to the photon arrival times. This statistical distribution is known as the instrument response function (IRF), and its width is commonly evaluated as