The structures of hydrogen silsesquioxane based porous low dielectric constant (low-k) films (XLK) prepared with varying process conditions are characterized using a combination of high-energy ion scattering, X-ray reflectivity, and small-angle neutron scattering. We measure the film thickness, average mass density, density depth profile, wall density, porosity, average pore size, pore spacing, pore connectivity, and atomic composition. We compare samples with varying dielectric constants and degrees of cure or Si-H bonding fraction. The structural parameters are correlated with the chemical bond structure as measured by Fourier transform infrared spectroscopy. The density profiles of the porous films were uniform, with a slight densification observed at the film surface. Films with similar k values but varying degrees of cure have almost identical structural characteristics. Lower dielectric constant films have larger porosities and average pore sizes but lower wall densities. The process conditions used to alter the dielectric constant affect not only the porosity but also many other structural parameters such as the wall density.

The design, synthesis, and properties of two new types of poly(borosiloxane) preceramic polymers, diethylborazine- (PVS−DEB) and pinacolborane-modified (PVS−PIN) poly(vinylsiloxane)s, are reported. The polymers are synthesized in excellent yields by the RhH(CO)(PPh3)3-catalyzed reactions of poly(vinylsiloxane) (PVS) with either diethylborazine (DEB−H) or pinacolborane (PIN−H). The spectroscopic data for the polymers, along with results of the RhH(CO)(PPh3)3-catalyzed hydroboration reactions of diethylborazine and pinacolborane with the model compound vinyltris(trimethylsiloxy)silane, are consistent with predominately anti-Markovnikov hydroboration of the polymer vinyl groups by the boranes. The degree of polymer hydroboration is simply controlled by varying the reactant ratios with the compositions of the PVS−DEB polymer ranging from (MeSiO1.5)0.42(PhSiO1.5)0.37(ViMe2SiO0.5)0.17(DEB(CH2)2Me2SiO0 .5)0.04 to (MeSiO1.5)0.42(PhSiO1.5)0.37(DEB(CH2)2Me2SiO0.5)0.21 and those of the PVS−PIN polymers from (MeSiO1.5)0.42(PhSiO1.5)0.37(ViMe2SiO0.5)0.18(PIN(CH2)2Me2SiO0. 5)0.03 to (MeSiO1.5)0.42(PhSiO1.5)0.37(PIN(CH2)2Me2SiO0.5)0.21. The borane-modified polymers are soluble and stable in ethers, acetone, methylene chloride, benzene, and pentane. Molecular weight analyses using SEC with refractive index, viscometry, and light-scattering triple detection show significant differences in hydrodynamic volume, molecular weight, radius of gyration, and conformation, which indicate that the PVS−PIN and PVS−DEB polymers adopt a more branched and spherical structure compared to the unmodified PVS. Bulk pyrolysis of the modified resins produced SiOCB ceramic chars with boron contents ranging from 0.3 to 0.7% depending upon the percentage of polymer modification. XRD and TEM studies of the 1800 °C chars of PVS and PVS−PIN showed significant differences in the degree of grain growth and distribution with the boron-modified char showing both a smaller average crystallite size and a more narrow size range. The PVS−PIN polymers were found to be excellent melt-processable, single-source precursors to small-diameter SiOCB fibers.