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A general micro-molding approach based on MEMS fabrication has been introduced to fabricate 3-dimensional (3-D) electrodes for microbatteries. Batteries based on 3-D microstructure are shown to offer significant advantages (e.g., small areal footprint and short diffusion lengths) in comparison to the conventional 2-D thin film batteries. In this paper, microelectrodes for Li-ion and Ni-Zn batteries have been fabricated and tested

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A silicon-micromachined rechargeable nickel-zinc alkaline microbattery featuring out-of-plane interdigitated electrodes is reported. The three-dimensional (3-D) battery architecture offers a new approach in developing miniaturized power sources to provide enough power and energy density for autonomous MEMS devices and microelectronic circuits on their small foot print. The battery consists of nickel hydroxide cathode and zinc anode post electrodes which are densely packed in an interdigitated manner. The posts are 50 µm in diameter and 400 µm tall, with foot print area of 5x5 mm 2 . Initial prototypes demonstrated a functional battery for the first few cycles of operation.