The indium tin oxide (ITO) thin films are grown on quartz glass substrates by the pulsed laser dep osition method. The structural, electrical, and optical properties of ITO films are studied as a function of the substrate temperature, the oxygen pressure in the vacuum chamber, and the Sn concentration in the target. The transmittance of grown ITO films in the visible spectral region exceeds 85%. The minimum value of resistivity 1.79 × 10 -4 Ω cm has been achieved in the ITO films with content of Sn 5 at %.

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