-The first part of this paper deals with curled shunt capacitive MEMS switched varactors with good power handling capabilities. These devices have been able to achieve 1 billion cycles under 5 W in hot switching conditions. These cantilevers have been used as switched capacitors periodically loaded along a Coplanar Wave Guide (CPW) line to form a Distributed MEMS Transmission Line (DMTL) phase shifter. In the second part, the integration of these beams in 90° and 180° DMTL sections operating at 15 GHz is shown. For these respective configurations, phase shifts of 89.3° and 178° have been observed and validate this conception. With reasonable loss of 60°/dB, these devices are among the first MEMS based phase shifter in literature able to operate at such power level in hot switching conditions.

In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched capacitors with an enhanced topology is presented in this paper to prevent it. This kind of device and its promising performances will serve to fabricate a MEMS based phase shifter able to work under several watts.I.