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Atmospheric Pressure Plasma Jet (APPJ) arrays are considered as one of the most promising methods for uniform plasma processing of large uneven surfaces. To improve the downstream uniformity and enhance the surface treatment effects, it is important to reveal the mechanisms of the jet‐to‐jet interactions of plasma plumes in the jet array. In this paper, the electrical, optical, and fluid characteristics of the He and Ar three‐channel one‐dimensional (1D) plasma jet arrays with cross‐field needle‐ring electrode structure are studied and compared. It is found that there are divergences in the outside plumes of the propagation trajectory by the repellency of the plasma bullets and the spatial uniformity of the He and Ar plasma jet arrays can be improved with a lower applied voltage and a higher gas flow rate. The deflection angle of side plumes with respect to the central one of He is larger than that of Ar jet array due to the lighter molecular weight and better discharge synchronization. The experimental results show that Ar jet array is more controllable and stable and is more suitable for the design of the practical, simpler, and cheaper scalable plasma jet arrays.

A coaxial dielectric barrier discharge (DBD) reactor with double layer dielectric barriers has been developed for exhaust gas treatment and excited either by AC power or nanosecond (ns) pulse to generate atmospheric pressure plasma. The comparative study on the discharge characteristics of the discharge uniformity, power deposition, energy efficiency, and operation temperature between AC and ns pulsed coaxial DBD is carried out in terms of optical and electrical characteristics and operation temperature for optimizing the coaxial DBD reactor performance. The voltages across the air gap and dielectric layer and the conduction and displacement currents are extracted from the applied voltages and measured currents of AC and ns pulsed coaxial DBDs for the calculation of the power depositions and energy efficiencies through an equivalent electrical model. The discharge uniformity and operating temperature of the coaxial DBD reactor are monitored and analyzed by optical images and infrared camera. A heat conduction model is used to calculate the temperature of the internal quartz tube. It is found that the ns pulsed coaxial DBD has a much higher instantaneous power deposition in plasma, a lower total power consumption, and a higher energy efficiency compared with that excited by AC power and is more homogeneous and stable. The temperature of the outside wall of the AC and ns pulse excited coaxial DBD reaches 158 °C and 64.3 °C after 900 s operation, respectively. The experimental results on the comparison of the discharge characteristics of coaxial DBDs excited by different powers are significant for understanding of the mechanism of DBDs, reducing energy loss, and optimizing the performance of coaxial DBD in industrial applications.