Two-dimensional materials
can be combined by placing individual
layers on top of each other, so that they are bound only by their
van der Waals interaction. The sequence of layers can be chosen arbitrarily,
enabling an essentially atomic-level control of the material and thereby
a wide choice of properties along one dimension. However, simultaneous
control over the structure in the in-plane directions is so far still
rather limited. Here, we combine spatially controlled modifications
of 2D materials, using focused electron irradiation or electron beam
induced etching, with the layer-by-layer assembly of van der Waals
heterostructures. The presented assembly process makes it possible
to structure each layer with an arbitrary pattern prior to the assembly
into the heterostructure. Moreover, it enables a stacking of the layers
with accurate lateral alignment, with an accuracy of currently 10
nm, under observation in an electron microscope. Together, this enables
the fabrication of almost arbitrary 3D structures with highest spatial
resolution.
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