This paper reports our work on the development of thin composite films based on aligned multi-walled carbon nanotubes (CNTs) forest embedded in epoxy polymer matrix dedicated for 3D-interconnection in flexible substrate. To reach this goal, information about local CNT properties is strongly needed. In this study, aligned multi-walled carbon nanotube carpets were prepared by aerosol Assisted catalytical chemical vapor deposition (AA-CCVD) process. Such carpets were then embedded in a polymer matrix, subsequently thinned by chemical mechanical polishing (CMP) process and finally treated by plasma process. Then, to determine local conducting properties of CNT, the surface of the composite film is studied by conductive AFM (C-AFM) and scanning spreading resistance microscopy. These methods are discussed and compared. C-AFM appears to be the most efficient method to obtain high resolution current maps. For the first time, a local electrical property mapping and current versus applied voltage characteristics over single carbon nanotube in vertical arrangement are obtained. These results show metallic behavior for nanotubes and emphasize that the electrical conduction is mainly driven by the external walls.

International audienceWe present the different elaboration steps of a composite formed of carbon nanotubes (CNT) carpet embedded in an epoxy polymer. Detailed characterization at each step of the elaboration process is performed. The good alignment of CNT in as-grown carpets is kept all along the elaboration process of the composite, as it is measured at both macro and microscopic scales by X-ray scattering. We also ensured by X-ray fluorescence measurements that the iron-based catalyst particles used for the synthesis were removed from the carpet after a high temperature post-annealing treatment. These measurements give valuable information for further applications involving unidirectional nanotube composites and membranes, where CNT alignment is a key parameter