The growth front roughness of linear poly( p-xylylene) films grown by vapor deposition polymerization has been investigated using atomic force microscopy. The interface width w increases as a power law of film thickness d, w approximately d(beta), with beta = 0. 25+/-0.03, and the lateral correlation length xi grows as xi approximately d(1/z), with 1/z = 0.31+/-0.02. This novel scaling behavior is interpreted as the result of monomer bulk diffusion, and belongs to a new universality class that has not been discussed previously.
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