A study of Mg doping of AlxGa1−xN up to x∼50% using microstructural and electrical probes is reported. The viability of effective p-type doping is defined by a minimum concentration of Mg required to offset the background impurities and, more importantly, a maximum limit above which inversion domains and structural defects start to nucleate, accompanied by a rapid degradation of electrical transport. Resistivity of 10 Ω cm and free hole concentrations above 1017cm−3 are achieved for AlxGa1−xN up to x∼50% within an optimum window of Mg incorporation.
We report flexible synthesis of group III–nitride nanowires and nanostructures by metalorganic chemical vapor deposition (MOCVD) via a catalytic vapor-liquid-solid (VLS) growth mechanism. Supersaturation and surface stoichiometry strongly influence the stability of liquid droplets and growth selectivity. To facilitate and sustain the VLS growth, indium catalyst is introduced based on thermodynamic consideration. The employment of mesoporous molecular sieves (MCM-41) helps to prevent the coalescence of catalyst droplets and to promote nucleation statistics. Both GaN and AlN nanowires have been synthesized using MOCVD. Three-dimensional AlN∕GaN trunk-branch nanostructures are reported to illustrate the versatility of incorporating the VLS mechanism into MOCVD process.
Growth of ternary AlGaN nanowires using metalorganic chemical vapor deposition is investigated. Structural, chemical, and optical characterization at nanoscopic scale is carried out by high resolution transmission electron microscopy, x-ray energy dispersive spectroscopy, and spatially resolved cathodoluminescence. Spontaneous formation of Al(Ga)N∕GaN coaxial nanowires with distinct emission at 370 nm is observed. It is identified that the interplay between surface kinetics and thermodynamics facilitates the catalytic growth of GaN core while a limited surface diffusion of Al adatoms leads to nonselective, vapor-solid growth of Al(Ga)N sheath. The observation points to a fundamental difference in nanosynthesis using near-equilibrium and nonequilibrium techniques.
We report on the development of UV light-emitting diodes in the 340nm wavelength range, based on quaternary AlGaInN quantum-well active media. Output powers up to 1mW from small area devices (<100μm diameter) directly off a planar chip have been achieved. The devices have been operated as subnanosecond pulsed sources to demonstrate their applicability to compact time-resolved fluorescence spectroscopy.
We have investigated the morphological evolution during heteroepitaxial growth of AlN on GaN by metal-organic chemical vapor deposition at different V/III ratios. Two-dimensional layer–by–layer and step flow growth modes, combined with strain-induced cracking, are observed at low and intermediate V/III ratios, while nitrogen-rich conditions yield three-dimensional domain-like growth due to limited Al adatom diffusion. Samples grown at the metal-rich conditions exhibit a crosshatch pattern of surface undulations possibly related to the presence of misfit dislocations that form at the early stages of nucleation. Our observations show that the local stoichiometry at the vapor-solid interface strongly influences the adatom kinetics during the growth, thereby affecting the nature of strain relaxation and growth mode.
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