A new method to fabricate microfluidic channel which has metal electrodes on side wall is presented. Three dimensional electrode patterns were deposited through the shadow mask on highly recessed surfaces of microchannel. Polymer microchannel was fabricated using polymer molding technique. Shadow mask for electrode patterning were fabricated using MEMS process. Electrodes were patterned on side wall of microchannel using shadow effects occurring at angled evaporation through shadow mask. The electrodes on side walls facing each other are expected to provide more sensitivity at bio-analysis devices based on impedance variation.

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