We aimed to increase the processing area of the roll-to-roll (R2R) nanoimprint lithography (NIL) process for high productivity, using a long roller. It is common for a long roller to have bending deformation, geometric errors and misalignment. This causes the non-uniformity of contact pressure between the rollers, which leads to defects such as non-uniform patterning. The non-uniformity of the contact pressure of the conventional R2R NIL system was investigated through finite element (FE) analysis and experiments in the conventional system. To solve the problem, a new large-area R2R NIL uniform pressing system with five multi-backup rollers was proposed and manufactured instead of the conventional system. As a preliminary experiment, the possibility of uniform contact pressure was confirmed by using only the pressure at both ends and one backup roller in the center. A more even contact pressure was achieved by using all five backup rollers and applying an appropriate pushing force to each backup roller. Machine learning techniques were applied to find the optimal combination of the pushing forces. In the conventional pressing process, it was confirmed that pressure deviation of the contact area occurred at a level of 44%; when the improved system was applied, pressure deviation dropped to 5%.

In roll-offset printing (patterning) technology with a PDMS blanket as a transfer medium, one of the major reliability issues is the occurrence of swelling, which involves absorption of the ink solvent in the printing blanket with repeated printing. This study developed a method to resolve blanket swelling in gravure offset roll printing and performed experiments for performance verification. The physical phenomena of mass and heat transfer were applied to fabricate a device based on convection drying. The proposed device managed to effectively control blanket swelling through drying by blowing air and additional temperature control. The experiments verified that printing quality (in particular the variation of the width of printed patterns) was maintained over 500 continuous printing.

Demand for high throughput manufacturing has recently increased in various fields, such as electronics, photonics, optical devices, and energy. Moreover, flexible electronic devices are indispensable in applications such as touch screens, transparent conductive electrodes, transparent film heaters, organic photovoltaics, organic light-emitting diodes, and battery. For these applications, a large-area roll-to-roll (R2R) process is a promising method for producing with high throughput. However, bending deformation of rollers is unavoidable in a large-scale R2R system, which produces non-uniformity in force distribution during processing and reduces the sample quality. In this study, we propose a new R2R imprinting module to mitigate the deformation by using an additional backup roller to achieve uniform force distribution. From numerical simulations, we found that there exists an optimal imprinting force for each backup roller length to obtain the best uniformity. Experimental results using a large-area pressure sensor verified the effectiveness of the proposed method. Finally, the R2R nanoimprint lithography process showed that the proposed method produces patterns of 100 nm width with uniform residual layer thickness, which are distributed across the substrate of 1.2 m width.

In this work, we investigated the compensation of strain deviation in the machine direction of a web in the roll-to-roll process. As flexible devices have become popular, many researchers have begun to study roll-to-roll processes for the mass-production of flexible devices at low cost. In the continuous roll-to-roll process, an electronic circuit pattern is printed on the web while the web is transferring. Due to tension and Poisson’s ratio, a non-uniform strain distribution can occur in the web. This strain distribution occurs mainly at the center of the web and causes a register error in the machine direction. In this work, we designed a roller to minimize the strain deviation. The design of the compensation roller was optimized using the design of experiments (DOE) methodology and analysis of variance (ANOVA), and the compensation performance was verified through experiments and simulations. According to the results of a comparative experiment conducted to confirm the correcting performance of the optimized roller, the strain deviation in the machine direction decreased by approximately 48% with the proposed roller compared to that of the conventional roller.