Materials science is nowadays facing challenges in optimizing properties of materials which are needed for numerous technological applications and include, but are not limited to, mechanics, electronics, optics, etc. The key issue is that for emerging applications materials are needed which incorporate certain properties from polymers or biopolymers and metals or ceramics at the same time, thus fabrication of functional hybrid materials becomes inevitable. Routes for the synthesis of functional hybrid materials can be manifold. Among the explored routes vapor phase processing is a rather novel approach which opts for compatibility with many existing industrial processes. This topical review summarizes the most important approaches and achievements in the synthesis of functional hybrid materials through vapor phase routes with the goal to fabricate suitable hybrid materials for future mechanical, electronic, optical or biomedical applications. Most of the approaches rely on atomic layer deposition (ALD) and techniques related to this process, including molecular layer deposition (MLD) and vapor phase infiltration (VPI), or variations of chemical vapor deposition (CVD). The thus fabricated hybrid materials or nanocomposites often show exceptional physical or chemical properties, which result from synergies of the hybridized materials families. Even though the research in this field is still in its infancy, the initial results encourage further development and promise great application potential in a large variety of applications fields such as flexible electronics, energy conversion or storage, functional textile, and many more.

The physical properties of polymers can be significantly altered by blending them with inorganic components. This can be done during the polymerization process, but also by post-processing of already shaped materials, for example through coating by atomic layer deposition (ALD) or hybridizing through vapor phase infiltration (VPI), both of which are beneficial in their own way. Here, a new processing strategy is presented, which allows distinct control of the coating and infiltration. The process is a hybrid VPI and ALD process, allowing separate control of infiltrated and coated components. This new simultaneous vapor phase coating and infiltration process (SCIP) enhances the degrees of freedom for optimizing the properties of polymers, as shown on the example of Kevlar 29 fibers. The SCIP treated fibers show an increase of 17% of their modulus of toughness (MOT) in comparison to native Kevlar, through the nanoscale coating with alumina. At the same time their intrinsic sensitivity to 24 hours UVirradiation was completely suppressed through another infiltrated material, zinc oxide, which absorbs the UV irradiation in the subsurface area of the fibers. Fig. 2 Mechanical properties comparison. Comparison of the mechanical properties of untreated Kevlar fibers and fibers after infiltration (I-Al 2 O 3 ) or coating (C-Al 2 O 3 ) with Al 2 O 3 and after infiltration with ZnO and simultaneous coating with Al 2 O 3 (SCIP). (A) Modulus of toughness before and after irradiation with UV light (all values are averaged from 7 samples and the error bars correspond to the standard error) C-ZnO and I-ZnO refer to sample processed in earlier work, 6 and (B) stress-strain curves before and after irradiation with UV light.This journal is