The effect of neutron irradiation on the electrical and piezoelectric properties of a PMN-PT [(Pb(Mg(1/3)Nb(2/3))O3-PbTiO3)] single crystal such as permittivity, electrical impedance and piezoelectric constant d33 has been investigated at 1 kHz. The changes of d33 and permittivity depending on the dose of neutron irradiation for all samples of PMN-PT single crystal were found. In all samples, the permittivity, and piezoelectric constant d33 decreased with the increase of irradiation dose. Changes of XRD patterns depending on the dose of neutron irradiation for all samples were found. From the results of XRDs for analyzing the formation of the PMN-PT single crystals in single phase, the neutron irradiation will affect the crystallinity of PMN-PT single crystals.
Cu interconnects suffer from increased resistance and
poor reliability
at a sub-10 nm width. Ru and Mo have been highlighted recently as
the next interconnection material candidate due to their various advantages
over Cu; they have lower resistance than Cu at sub-10 nm, do not diffuse
into SiO2, and are etchable. Here, we evaluated the electromigration
(EM) reliability of Ru and Mo to confirm their feasibility for the
next-generation interconnection. The activation energy for EM failure
is calculated by measuring the mean time to failure (MTTF) of film
and wire structures while factoring in temperature increases with
thermal coefficient of resistance (TCR) measurements. In addition,
we investigate the EM properties in terms of resistivity-increasing
parameters that originate from geometry and additional fabrication
processes. Furthermore, we evaluate the EM performance in terms of
electrochemical potential. Our findings confirm the feasibility of
Ru as a promising candidate for next-generation interconnection applications,
providing enhanced reliability compared to conventional Cu interconnects.
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