This study aims at developing a 3D device for catching, separating, and transporting bio-particles based on dielectrophoresis (DEP). Target particles can be simultaneously caught and transported using the negative DEP method. In non-uniform electric fields, the levitation height or complex permittivity of certain particle may be different from that of another and this property can facilitate separation of particles. We have designed and constructed a 3D device consisting of two layers of electrodes separated by a channel formed by 50 microm thick photoresist. The electrodes can operate effectively with 10-15 V and 5-7 MHz to catch all particles in the channel, and can move particles after switching the electric field to 5-15 V and 500-1,000 KHz. Hence, particles experienced coupling force of two different directional twDEP forces, and tallied with our estimation to move along the coupling direction.
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