Thin films of perfluorinated phthalocyanines F16Pc show promise as molecular semiconductors in organic field effect transistors. A review is provided of growth studies and electrical characterization of presently discussed materials. Using this state‐of‐the‐art as a starting point the synthesis and position of energy levels of partly fluorinated Zn(II) phthalocyanines is described. Growth characteristics of vapour‐deposited thin films on inorganic and organic dielectrics are studied. Possibilities to use fluorinated phthalocyanines in technical applications of OFET are discussed. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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PcZn as a well known organic semiconductor received new examination of its growth mode in thin films and reactions to oxygen exposure. PcZn thin films were grown on glass and polyimide substrates by physical vapor deposition. Ag electrodes had been deposited by a sputter process to allow electrical contact to the films. Conductivity measurements were performed insitu during the growth of films under high vacuum conditions. Characteristic current peaks were observed and explained by a Stranski-Krastanov growth mode. Current voltage characteristics revealing space charge limitation could be obtained beginning in the monolayer range. For pristine films n-type conduction was observed. Following deposition an increase of the conductivity was measured, caused by changes of the film structure. Ripening under high vacuum conditions could be separately discussed from doping effects caused by oxygen exposure which led to the well-known p-type characteristics of PcZn.Mater. Res. Soc. Symp. Proc. Vol. 965