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Results are presented on planar microcavity light emitting diodes with different device diameters. A record external quantum efficiency of 20% is achieved for a 1.5 mm light emitting diode. The strong dependence of the quantum efficiency on current density and device size are compared with theoretical results. A good correspondence is obtained when spectral broadening and photon recycling are taken into account.

This paper describes the design of substrate emitting microcavity LED's and a comparison of experimental results with modeling results. The modeling is based on a simulation tool which accounts for guided modes, quantum well reabsorption and photon recycling. The overall quantum efficiencies of X/2 and X cavities both with a 60% and a !M% reflecting DBR mirror are compared and a good qualitative correspondence is found between theory and experiment. The maximum theoretical overall quantum efficiency for the considered structures is expected to be around 14%' whereas the best experimental value amounts to 10.2%.