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Diamond materials have become progressively significant in the fabrication of heat sinks for power devices and lasers. To investigate the influence of polishing on CVD-Diamond, the surfaces of <100> and <110> coatings were analyzed, after a first abrasive treatment on a 30um diamond grit by scanning thermal microscopy based on a resistive platinum-probe. This technique describes in first order approximation the heat transfer of a metal-diamond interface. Through this method it was possible to diagnose a relevant reduction in thermal conductivity by a harsh sample preparation depending on the crystal orientation. The thermal conductivity of as deposited <100> diamond was measured at 1290 W/mK and was reduced to 520 W/mK. The thermal conductivity of as deposited <110> diamond was determined at 1780 W/mK whereas the same diamond surface, but abraded, shows a thermal conductivity of just 460 W/mK. Additionally the received images which represents the thermal conductivity qualitatively bring forward micro structures like e.g. grain boundaries.

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