Biomolecular motors such as F1-adenosine triphosphate synthase (F1-ATPase) and myosin are similar in size, and they generate forces compatible with currently producible nanoengineered structures. We have engineered individual biomolecular motors and nanoscale inorganic systems, and we describe their integration in a hybrid nanomechanical device powered by a biomolecular motor. The device consisted of three components: an engineered substrate, an F1-ATPase biomolecular motor, and fabricated nanopropellers. Rotation of the nanopropeller was initiated with 2 mM adenosine triphosphate and inhibited by sodium azide.

This work presents a new fabrication technology for silicon-based neural probe devices and their assembly into two-dimensional (2D) as well as three-dimensional (3D) microprobe arrays for neural recording. The fabrication is based on robust double-sided deep reactive ion etching of standard silicon wafers and allows full 3D control of the probe geometry. Wafer level electroplating of gold pads was performed to improve the 3D assembly into a platform. Lithography-based probe-tracking features for quality management were introduced. Probes for two different assembly methods, namely direct bonding to a flexible micro-cable and platform-based out-of-plane interconnection, were produced. Systems for acute and sub-chronic recordings were assembled and characterized. Recordings from rats demonstrated the recording capability of these devices.

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An out-of-plane interconnect system has been developed for biomedical microprobes. With this type of interconnect, different microelectromechanical system (MEMS) structures can be electrically and mechanically connected perpendicular to a backbone. The probes and backbone are processed separately which enables a modular approach. The MEMS structures are inserted into cavities (which act as sockets) and the electrical contact is established by means of overhanging gold clips which are bent and squeezed between the cavity wall and the MEMS upon insertion. The assembly is done using a flip-chip bonder. Prior to the deposition of the overhanging contact blades, an extreme planarization technique is employed for the fabrication of the gold clips. Topographies of 200 µm have been planarized using benzocyclobutene as a sacrificial material. Test structures have been made and assembled perpendicular to the substrate to perform a contact resistance measurement.