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Strain imaging of a magnetic layer formed on an air bearing surface of a hard disk drive head for perpendicular recording J.Thermal pole tip protrusion finite element analysis of thin film inductive recording heads Scanning Hall probe microscopy ͑SHPM͒ was used to evaluate integrated magnetic microactuators designed for hard disk drives. The Hall probe measurements of the generated magnetic field strength as a function of the applied current or distance were compared to results of a finite element method simulation. The SHPM measurements and simulation results are in good agreement, confirming that simulations supported by SHPM measurements can be used successfully to predict the performance of microactuators.

Key mechanical requirements for advanced Hard Disk Drive (HDD) recording heads are a minimal flying height and a perfect track following. By applying Micro Electro-mechanical Micro Systems (MEMS) technology, a Slider with an Integrated Microactuator (SLIM) enabling both in a cost competitive way was created. This paper describes the fabrication process for the system's electromagnetic microatuator and emphasizes the technology enhancements achieved after a process redesign. INTRODUCTIONA precondition to achieve an optimal recording density is a hard disk recording head which provides both a flying height adjustment and a second stage actuation capability for fine tracking [1][2][3]. To fulfill these requirements in a cost competitive way, a slider with an integrated microactuator (SLIM) was proposed [4]. A variable reluctance (VR) electromagnetic microactuator integrated into a pico formfactor slider (1,240 µm x 990 µm x 300 µm) activates a mounting platform which has a chiplet attached to it. The chiplet carries the read/write element. The microactuator is capable of moving the read/write element up and down (for head-to-disk spacing adjustment) as well as on an arc in lateral direction (allowing second stage actuation) [5]. Figure 1 shows a schematic representation of the SLIM design compared to a commercial slider.

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