laserinduced fluorescence (UF) measurements were made in a micrwave (2.45GHz) excned a-C:H deposnion plasma using thew beam of a frequencydoubled cw dye laser. Miscellaneous vibrational and rotational transitions d the electronically acned CH band system C%+-X%, at X z= 314nm were investigated. Spatially resolved rdatlonal, vibrational and translational temperatures as well as driR velocnies and denskies cd ground state CH molecules have been determined. The most impatant mlewlar constants for the transnions under investigation have been compiled and the evaluation procedure d UF signals is described. Deposnlon rates of aC:H layers are measured by &sewing me temporal development ot the interference fringe system on the substrate. me growth rate is wmpared with the Cn flux m me target. A simplified model of the discharge plasma explains the measured data in a roughly quantitative manner.
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