The plasma parameters and ion energy distributions (IED) of the dominant species in an Ar-H2 discharge are investigated with an energy resolved mass spectrometer and a Langmuir probe. The plasmas are generated in a conventional magnetron chamber powered at 150 W, 13.56 MHz at hydrogen flow rates ranging from 0 to 25 sccm with a fixed argon gas flow rate of 15 sccm. Various Hn+, SiHn+, SiHn fragments (with n = 1, 2, 3) together with Ar+ and ArH+ species are detected in the discharge. The most important species for the film deposition is SiHn (with n = 0, 1, 2). H fragments affect the hydrogen content in the material. The flux of Ar+ decreases and the flux of ArH+ increases when the hydrogen flow rate is increased; however, both fluxes saturate at hydrogen flow rates above 15 sccm. Electron density, ne, electron energy, Te, and ion density, ni, are estimated from the Langmuir probe data. Te is below 1.2 eV at hydrogen flow rates below 8 sccm, and about 2 eV at flow rates above 8 sccm. ne and ni decrease with increased hydrogen flow but the ratio of ni to ne increases. The formation of H+ ions with energies above 36 eV and electrons with energies greater than 2 eV contributes to the decrease in hydrogen content at hydrogen flow rates above 8 sccm. Analysis of the IEDs indicates an inter-dependence of the species and their contribution to the thin film growth and properties.

The plasma parameters and reaction kinetics in an inverted cylindrical magnetron chamber have been studied with an energy resolved mass spectrometer during the sputtering of aluminum targets in an Ar/O2 discharge. Mixtures of argon and oxygen were studied as a function of oxygen percentage (0%–90%) in the discharge. The plasma was powered at 4 kW and 40 kHz at a process pressure of 5 mTorr. Al+, Al, AlO, AlO+, O2+, O+, Al2O+, and Ar+ were among the species detected in the discharge. The deposition rate of the deposited thin film decreased with increasing oxygen percentage in the discharge and results indicated that the pure gamma-alumina was obtained when the percentage of oxygen was approximately 70%. The linear plot of energy distributions of the positively charged film forming species changed from a single peak to a bimodal distribution as the percentage of oxygen exceeds 65%. In a log plot, however, the distributions showed multiple peaks ranging from 2 eV to 78 eV. Fluctuations of about 1 eV in peak energies were observed.