Coherently enhancing laser pulses in a passive cavity provides ideal conditions for high-order harmonic generation in a gas, with repetition rates around 100 MHz (refs 1,2,3). Recently, extreme-ultraviolet radiation with photon energies of up to 30 eV was obtained, which is sufficiently bright for direct frequency-comb spectroscopy at 20 eV (ref. 4). Here, we identify a route to scaling these radiation sources to higher photon energies. We demonstrate that the ionization-limited attainable intracavity peak intensity increases with decreasing pulse duration. By enhancing nonlinearly compressed pulses of an Yb-based laser and coupling out the harmonics through a pierced cavity mirror, we generate spatially coherent 108 eV (11.45 nm) radiation at 78 MHz. Exploiting the full potential of the demonstrated techniques will afford high-photon-flux ultrashort-pulsed extreme-ultraviolet sources for a number of applications in science and technology, including photoelectron spectroscopy, coincidence spectroscopy with femtosecond to attosecond resolution and characterization of components and materials for nanolithography

We report on the experimental demonstration of a fiber chirped- pulse amplification system capable of generating nearly transform-limited sub 500 fs pulses with 2.2 mJ pulse energy at 11 W average power. The resulting record peak power of 3.8 GW could be achieved by combining active phase shaping with an efficient reduction of the acquired nonlinear phase. Therefore, we used an Ytterbium-doped large-pitch fiber with a mode field diameter of 105 µm as the main amplifier.

We investigate power scaling of ultrashort-pulse enhancement cavities. We propose a model for the sensitivity of a cavity design to thermal deformations of the mirrors due to the high circulating powers. Using this model and optimized cavity mirrors, we demonstrate 400 kW of average power with 250 fs pulses and 670 kW with 10 ps pulses at a central wavelength of 1040 nm and a repetition rate of 250 MHz. These results represent an average power improvement of one order of magnitude compared to state-of-the-art systems with similar pulse durations and will thus benefit numerous applications such as the further scaling of tabletop sources of hard x rays (via Thomson scattering of relativistic electrons) and of soft x rays (via high harmonic generation).

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