We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.

We have investigated spatial structure of fluctuation of amount of nanoparticles in amplitude modulated VHF discharge reactive plasma in order to understand interaction fluctuations between plasma and nanoparticles. The interaction fluctuation appeared in the whole discharge region. Especially, the strong interaction fluctuation existed at the edge region. The behaviors of time evolution of intensity of spatial structure of interaction fluctuation at the center and edge regions were different with each other. Nanoparticles at the edge region were smaller than ones in the main discharge region. It suggested that the interaction fluctuation is related to the growth of nanoparticles.