It is found that the etch pits revealed by molten KOH etching on the (001) GaAs surface have definitely different shapes depending on the Burgers vectors of the dislocations. The round hexagonal etch pit corresponds to a dislocation with Burgers vector of ½a〈101〉 inclined to the (001) plane, while the small round square etch pit corresponds to a dislocation with Burgers vector of ½a〈110〉 parallel to the (001) plane It is suggested that the larger hexagonal etch pit is associated with parallel pair of partial dislocations dissociated from perfect dislocations with Burgers vector of ½a〈110〉.
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