The observation of slow-wave sustained (SW) discharge in a whistler- or helicon-wave range of frequency is made using high-frequency and very-high-frequency bands of rf. The SW discharge occurs at an extremely low rf power and plasma density, which are lower than a capacitive-coupling discharge region.

Helicon-wave sustained (HW) and slow-wave sustained (SW) discharges are studied in a whistler- or helicon-wave range of frequency using high-frequency (13.56 MHz) and very-high-frequency (50 and 144 MHz) bands of rf. For 13.56 and 50 MHz, in addition to capacitive-coupling (E) discharge and the HW discharge, the SW discharge is observed at an extremely low rf power and plasma density; lower than the E discharge region. For 144 MHz, no E discharges appear and the transition from the SW discharge to the HW discharge occurs. In the SW discharge, both the electromagnetic and electrostatic waves are observed. The results of two-dimensional wave code and analytic calculation indicate that the electrostatic component of the electric field parallel to a static magnetic field is dominant in plasma production in the SW discharge.