Accurate determination of a chemical mechanical planarization (CMP) process reaching the end point is an important problem in the CMP process. In present work, the variation of the motor power signal of the polishing platen in the CMP process has been investigated, and the moving average method with 121-points moving window was used to smooth the original signal curve. Experiment results showed that the processed signal could facilitate the extraction of end-point feature for the in-situ end-point detection (EPD) system and it was relatively steady before and after the layer transition stage, which made it more reliable to detect the end point in situ. Comparing with other EPD methods, the system was less complicated, and it was easier to code for algorithm development. Finally, further analysis was performed and series of experiments provided a planarized via-revealed surface with low via dishing.

Abstract.Quadruped not only possess excellent kinetic speed and stability but also can adapt to various complex terrains, with the result that hydraulically actuated quadruped bionic robots with high load and outstanding adaptability have become the research hotspot. Hydraulic system, which is regarded as the dynamic part of a hydraulic quadruped robot, has a direct effect on the kinetic capability of robots. Based on dog’s structure bionics, hydraulically actuated quadruped robot was designed. In accordance with distribution modes of hydraulic cylinders which drive robot’s kinetic joints, a hydraulic oil-line system of the robot was designed in this paper. Combining the maximum design kinetic velocity, trotting movement pattern within foot’s work space was planned. Velocity curve of each joint’s hydraulic cylinder was obtained through simulation analysis of dynamic analysis software. According to the structure of asymmetrical hydraulic cylinder, minimum flux which the oil hydraulic pump theoretically requires at the robot’s maximum kinetic speed was calculated. With practical experience, the oilsource parameter which could meet the demands of hydraulic quadruped robot were determined.

In this paper, a combination of static and dynamic methods was used to identify effective fracture in Fractured-vuggy reservoir. An initial fracture model was established through the fuzzy neural network (FNN) and ant-tracking algorithm based on the static data (log and seismic data). We analysis the intel-well connectity and identify effective fracture based on dynamic data by pseudo-interfered well test， and then modify the fracture model. The application of this method solved the effective fracture identification problem of S48 unit .The fracture model got good result in numerical simulation.

The substation location is an important part of network planning . In this Paper, the optimal siting and site optimization mathematical model of classification are introduced , and the methods used in substation siting analyze many algorithms for a more comprehensive overview ; Finally,we offer some suggestions for the method of substation power market environment devlopment research .

Problems such as low voltage and big line loss have long existing in the power grid in rural areas of China. In recent years, some province and cities have improved voltage and reduced line loss by installing SVG at substations in rural power grids, and the effect is remarkable.With great compensation capacity and a good variety of modes of compensation, SVG is sure to replace old reactive compensation devices in rural power grid in future, which requires evaluation and analysis of SVG reliability so as to guarantee safety and stability of the power grid. However, now no research or analysis has been made in China on SVG reliability in rural power grids, which affects wide promotion of SVG in rural power grids.Under the background of Liaoning Power Grid 10kV/±5Mvar Chain SVG, this paper analyzes the reliability of k/n (G) system model of SVG master circuit structure, improving the accuracy of system reliability estimation. The estimation matches the operation outcome, thus providing data basis for the feasibility of SVG’s wide application in rural power grid in future.